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Dry etching for VLSI

By: Van Roosmalen, A.J | Baggerman, J.A.G | Brader, S.J.HLanguage: EN Series: Updates in Applied Physics and Electrical TechnologyPublisher: New York Plenum 1991Description: xvii, 237p. : illISBN: 0306438356Subject(s): ETCHING | INTEGRATED CIRCUITS, VLSI
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 Book Book Library, University of Moratuwa
The University of Moratuwa Library (UML) is one of the most prominent technology libraries in the country. Its main subject specializations are Engineering, Architecture and Information Technology. However, the library caters to the requirements of the membership by housing books and other materials of general interest as well.
On Request Collection
621.3.049.771.14:621.794 V3 (Browse shelf) Available 70678
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