Dry etching for VLSI (Record no. 71540)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 005180000a22001930004500 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0306438356 |
| 080 ## - UNIVERSAL DECIMAL CLASSIFICATION NUMBER | |
| Universal Decimal Classification number | 621.3.049.771.14:621.794 |
| Item number | V3 |
| 041 ## - LANGUAGE CODE | |
| Language code of text/sound track or separate title | EN |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Van Roosmalen, A.J. |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Baggerman, J.A.G. |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Brader, S.J.H. |
| 245 ## - TITLE STATEMENT | |
| Title | Dry etching for VLSI |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc. | New York |
| Name of publisher, distributor, etc. | Plenum |
| Date of publication, distribution, etc. | 1991 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xvii, 237p. : ill. |
| 440 ## - SERIES STATEMENT/ADDED ENTRY--TITLE | |
| Title | Updates in Applied Physics and Electrical Technology |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | ETCHING |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | INTEGRATED CIRCUITS, VLSI |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Book |
| Withdrawn status | Lost status | Source of classification or shelving scheme | Damaged status | Not for loan | Permanent Location | Current Location | Shelving location | Date acquired | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Library, University of Moratuwa | Library, University of Moratuwa | On Request Collection | 05/02/2014 | 621.3.049.771.14:621.794 V3 | 70678 | 05/02/2014 | 05/02/2014 | Book |