| 000 | 003830000a22001450004500 | ||
|---|---|---|---|
| 245 | _aThe Science and engineering of microelectronic fabrication | ||
| 100 | _aCAMPBELL, Stephen A. | ||
| 260 |
_aNew York _bOxford University Press _c1996 |
||
| 300 | _a536p. | ||
| 020 | _a0-19-510508 | ||
| 080 |
_a621.3.049.77 _bC3 |
||
| 650 | _aMicroelectronics | ||
| 041 | _aEN | ||
| 942 | _cBK | ||
| 999 |
_c72764 _d72764 |
||