| 000 | 005990000a22002050004500 | ||
|---|---|---|---|
| 245 | _aProcess engineering analysis in semiconductor device fabrication | ||
| 100 | _aMiddleman, Stanley | ||
| 100 | _aHochberg, Arthur K. | ||
| 260 |
_aNew York _bMcGraw-Hill _c1993 |
||
| 300 | _axvii, 774p. : ill. | ||
| 440 | _aMcGraw-Hill chemical engineering series | ||
| 500 | _aIndex included | ||
| 020 | _a0070418535 | ||
| 080 |
_a621.382 _bM5 |
||
| 650 | _aSEMICONDUCTOR DEVICES | ||
| 650 | _aSEMICONDUCTOR MATERIALS | ||
| 650 | _aSEMICONDUCTOR DEVICE MANUFACTURE | ||
| 041 | _aEN | ||
| 942 | _cBK | ||
| 999 |
_c66180 _d66180 |
||