000 004580000a22001690004500
245 _aSemiconductor physical electronics
100 _aLi, Sheng S.
260 _aNew York
_bPlenum Press
_c1993
300 _axiii, 507p. : ill.
440 _a[Microdevices : physics and fabrication technologies]
020 _a0306441578
080 _a621.382
_bL5
650 _aPHYSICS-SOLID STATE
650 _aSEMICONDUCTOR DEVICES
041 _aEN
942 _cBK
999 _c64108
_d64108