| 000 | 005360000a22001690004500 | ||
|---|---|---|---|
| 245 | _aRapid thermal processing for future semiconductor devices | ||
| 700 | _aFukuda, Hisashi ed. | ||
| 111 | _aINTERNATIONAL CONFERENCE ON RAPID THERMAL PROCESSING FOR FUTURE SEMICONDUCTOR DEVICES (2001 : Ise-Shima, Mie) | ||
| 260 |
_aAmsterdam _bElsevier _c2003 |
||
| 300 | _ax, 150p. : ill. | ||
| 020 | _a0444513396 | ||
| 080 |
_a621.315.5 _bI6 |
||
| 650 | _aSEMICONDUCTOR DEVICES | ||
| 650 | _aThermal Effects | ||
| 041 | _aEN | ||
| 942 | _cCP | ||
| 999 |
_c26066 _d26066 |
||