000 00611 a2200193 4500
999 _c177179
_d177179
008 191023t2004 ||||| |||| 00| 0 eng d
020 _a9780471232797
041 _aeng
080 _a621.3.049.77
_bM3
942 _cBK
_04
100 _aMay, Gray S.
700 _aSze, Simon M.
_926162
245 _aFundamentals of semiconductor fabrication
260 _aHoboken
_bJohn Wiley
_c2004
300 _axiii, 305p. : charts, ill., photos.,
_bindex included
650 _aINTEGRATED CIRCUITS-Design and construction
650 _aINTEGRATED CIRCUITS
650 _aSEMICONDUCTORS-Design and construction
_922037