| 000 | 005680000a22001930004500 | ||
|---|---|---|---|
| 008 | 150831t2004 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a1580535364 | ||
| 041 | _aeng | ||
| 080 |
_a621.382 _bM4 |
||
| 942 |
_cBK _04 |
||
| 100 | _aBeeby, Stephen ...[et al.] | ||
| 245 | _aMEMS mechanical sensors | ||
| 260 |
_aBoston _bArtech House _c2004 |
||
| 300 | _ax, 269p. : ill. | ||
| 440 |
_aMicroelectromechanical system series _920788 |
||
| 500 | _aIndex included | ||
| 650 |
_aMICROELCTROMECHANICAL SYSTEMS-Design And Construction _920783 |
||
| 650 | _aTRANSDUCERS | ||
| 999 |
_c146460 _d146460 |
||