| 000 | 004640000a22001810004500 | ||
|---|---|---|---|
| 008 | 150831t2012 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9780132497367 | ||
| 041 | _aeng | ||
| 080 |
_a621.382 _bL5 |
||
| 942 |
_cBK _04 |
||
| 100 | _aLiu, Chang | ||
| 245 | _aFoundations of MEMS | ||
| 250 | _a2nd ed. | ||
| 260 |
_aUpper Saddle River _bPrentice Hall _c2012 |
||
| 300 | _axiv, 562p. | ||
| 500 | _aIndex included | ||
| 650 |
_aMICROELCTROMECHANICAL SYSTEMS _920783 |
||
| 999 |
_c146452 _d146452 |
||