000			003730000a22001450004500
008			151204t1982 xxu||||| |||| 00| 0 eng d
020			_a0-471-08500-6
041			_aeng
080			_a621.315.5 _bN5
942			_cBK
100			_aNicollian, E.H.
100			_aBrews, J.R.
245			_aMetal oxides semiconductor physics & technology
260			_aNew York _bJ.Wiley _c1982
999			_c139273 _d139273