000			004800000a22001690004500
008			151223t1987 xxu||||| |||| 00| 0 eng d
020			_a0-07-054280-5
041			_aeng
080			_a621.3.049.77 _bR8
942			_cBK
100			_aRUSKA, W. Scot
245			_aMicroelectronic processing:an introduction to the manufacture of integrated circuits
260			_aNew York _bMcGraw-Hill _c1987
300			_a430 p.
650			_aINTEGRATED CIRCUITS
650			_aMICROELECTRONICS
999			_c127315 _d127315