000
002890000a22001210004500
245
_a
Modern semiconductor fabrication technology
100
_a
Gise, P.
100
_a
Blanchard, R.
260
_a
New Jersey
_b
Prentice Hall
_c
1986
080
_a
621.382
_b
G5
041
_a
EN
942
_c
BK
999
_c
118307
_d
118307