000 002890000a22001210004500
245 _aModern semiconductor fabrication technology
100 _aGise, P.
100 _aBlanchard, R.
260 _aNew Jersey
_bPrentice Hall
_c1986
080 _a621.382
_bG5
041 _aEN
942 _cBK
999 _c118307
_d118307