000			002980000a22001330004500
245			_aVacuum technology
100			_aRoth, A.
260			_aAmsterdam _bNorth Holland _c1976
300			_axiv, 496p. : ill.
020			_a0720402138
080			_a621-186.2 _bR6
041			_aEN
942			_cBK
999			_c102421 _d102421