TY  - GEN
AU  - Gupta, Dinesh C. and Brown, George, A. eds.
ED  - THE CONFERENCE ON GATE DIELECTRIC INTEGRITY (1999 : San Jose)
TI  - Gate dielectric integrity : material, process, and tool qualification
SN  - 0803126158
PY  - 2000///
CY  - West Conshohocken
PB  - ASTM
KW  - ELECTRONICS CIRCUITS
KW  - ELECTRONICS ENGINEERING-GATES
ER  -