TY  - GEN
AU  - Gupta, Dinesh C. ed.
ED  - INTERNATIONAL SYMPOSIUM ON SEMICONDUCTOR PROCESSING (5th : 1998 : Santa Clara)
TI  - Semiconductor fabrication : technology and metrology
SN  - 0803112734
PY  - 1989///
CY  - Philadelphia
PB  - ASTM
KW  - SEMICONDUCTORS-Design and construction
KW  - SEMICONDUCTORS-Congresses
ER  -