TY  - GEN
AU  - Gupta, Dinesh C. ; Langer, Paul H. eds.
ED  - INTERNATIONAL SYMPOSIUM ON SEMICONDUCTOR PROCESSING (4th : 1986 : San Jose)
TI  - Emerging semiconductor technology
SN  - 0803104596
PY  - 1987///
CY  - Philadelphia
PB  - ASTM
KW  - SEMICONDUCTOR INDUSTRY
KW  - SEMICONDUCTORS - DESIGN
ER  -