TY  - GEN
AU  - May, Gray S. 
AU  - Sze, Simon M.
TI  - Fundamentals of semiconductor fabrication 
SN  - 9780471232797
PY  - 2004///
CY  - Hoboken
PB  - John Wiley
KW  - INTEGRATED CIRCUITS-Design and construction
KW  - INTEGRATED CIRCUITS
KW  - SEMICONDUCTORS-Design and construction
ER  -