TY  - BOOK
AU  - Fernando, Harendra
TI  - Fabrication and characterisation of photonic integrated circuits
SN  - 9172836903
PY  - 2004///
CY  - Stockholm
KW  - PHOTONIC INTEGRATED CIRCUITS
KW  - PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITION(PECVD)
KW  - Reactive Ion Etching (RIE)
ER  -