TY  - GEN
AU  - Kempe, Volker
TI  - Inertial MEMS : principles and practice
SN  - 9780521766586
PY  - 2011///
CY  - Cambridge
PB  - Cambridge University Press
KW  - MICROELCTROMECHANICAL SYSTEMS
KW  - Inertial Navigation Systems
KW  - BioMEMS
N1  - Index included
ER  -