TY  - GEN
AU  - RUSKA, W. Scot
TI  - Microelectronic processing:an introduction to the manufacture of integrated circuits
SN  - 0-07-054280-5
PY  - 1987///
CY  - New York
PB  - McGraw-Hill
KW  - INTEGRATED CIRCUITS
KW  - MICROELECTRONICS
ER  -