Middleman, Stanley Hochberg, Arthur K.
Process engineering analysis in semiconductor device fabrication - New York McGraw-Hill 1993 - xvii, 774p. : ill. - McGraw-Hill chemical engineering series .
Index included
0070418535
SEMICONDUCTOR DEVICES
SEMICONDUCTOR MATERIALS
SEMICONDUCTOR DEVICE MANUFACTURE
621.382 / M5
Process engineering analysis in semiconductor device fabrication - New York McGraw-Hill 1993 - xvii, 774p. : ill. - McGraw-Hill chemical engineering series .
Index included
0070418535
SEMICONDUCTOR DEVICES
SEMICONDUCTOR MATERIALS
SEMICONDUCTOR DEVICE MANUFACTURE
621.382 / M5