Liu, Chang
Foundations of MEMS - 2nd ed. - Upper Saddle River Prentice Hall 2012 - xiv, 562p.
Index included
9780132497367
MICROELCTROMECHANICAL SYSTEMS
621.382 / L5
Foundations of MEMS - 2nd ed. - Upper Saddle River Prentice Hall 2012 - xiv, 562p.
Index included
9780132497367
MICROELCTROMECHANICAL SYSTEMS
621.382 / L5