| 000 | 005790000a22001930004500 | ||
|---|---|---|---|
| 008 | 150831t2003 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a1584883065 | ||
| 041 | _aeng | ||
| 080 |
_a621.382:620.3 _bP4 |
||
| 942 |
_cBK _04 |
||
| 100 | _aPelesko, John A. | ||
| 100 | _aBernstein, David H. | ||
| 245 | _aModeling MEMS and NEMS | ||
| 260 |
_aBoca Raton _bChapman & Hall/CRC _c2003 |
||
| 300 | _axxi, 357p. : ill. | ||
| 500 | _aIndex included | ||
| 650 |
_aMICROELCTROMECHANICAL SYSTEMS-Mathematical Models _920783 |
||
| 650 |
_aNANOELECTROMECHANICAL SYSTEMS _920799 |
||
| 999 |
_c146461 _d146461 |
||